Mirkarimi, L.: search on Z-Library

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1

Developing a viable multilayer coating process for extreme ultraviolet lithography reticles

Mirkarimi, Paul B.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2004

Language:

english

File:

PDF, 430 KB

english, 2004

2

)N superlattices

Kim, Jin O., Achenbach, Jan D., Mirkarimi, Paul B., Barnett, Scott A.

Journal:

Physical Review B

Year:

1993

Language:

english

File:

PDF, 439 KB

english, 1993

3

Evidence for rhombohedral boron nitride in cubic boron nitride films grown by ion-assisted deposition

Medlin, D. L., Friedmann, T. A., Mirkarimi, P. B., Mills, M. J., McCarty, K. F.

Journal:

Physical Review B

Year:

1994

Language:

english

File:

PDF, 458 KB

english, 1994

4

[IEEE 2018 IEEE 68th Electronic Components and Technology Conference (ECTC) - San Diego, CA, USA (2018.5.29-2018.6.1)] 2018 IEEE 68th Electronic Components and Technology Conference (ECTC) - Scaling Package Interconnects Below 20µm Pitch with Hybrid Bonding

Gao, Guilian, Mirkarimi, Laura, Fountain, Gill, Wang, Liang, Uzoh, Cyprian, Workman, Thomas, Guevara, Gabe, Mandalapu, Chandrasekhar, Lee, Bongsub, Katkar, Rajesh

Year:

2018

Language:

english

File:

PDF, 378 KB

english, 2018

5

An ion-assisted Mo-Si deposition process for planarizing reticle substrates for extreme ultraviolet lithography

Mirkarimi, P.B., Spiller, E.A., Stearns, D.G., Sperry, V., Baker, S.L.

Journal:

IEEE Journal of Quantum Electronics

Year:

2001

Language:

english

File:

PDF, 43 KB

english, 2001

6

SPIE Proceedings [SPIE Photomask 2001 - Monterey, CA (Wednesday 3 October 2001)] 21st Annual BACUS Symposium on Photomask Technology - Multilayer coating requirements for extreme ultraviolet lithography masks

Hector, Scott D., Gullikson, Eric M., Mirkarimi, Paul B., Spiller, Eberhard A., Kearney, Patrick A., Folta, James A., Dao, Giang T., Grenon, Brian J.

Year:

2002

Language:

english

File:

PDF, 332 KB

english, 2002

7

Soils selenium level and esophageal cancer: An ecological study in a high risk area for esophageal cancer

Shahryar Semnani, Gholamreza Roshandel, Azadehsadat Zendehbad, Abbasali Keshtkar, Hadi Rahimzadeh, Nafiseh Abdolahi, Sima Besharat, Abdolvahab Moradi, Honeyehsadat Mirkarimi, Seyedzinab Hasheminasab

Journal:

Journal of Trace Elements in Medicine and Biology

Year:

2010

Language:

english

File:

PDF, 258 KB

english, 2010

8

Mechanical properties of epitaxial TiN/(V0.6Nb0.4)N superlattices measured by nanoindentation

Hubbard, Kevin M., Jervis, Thomas R., Mirkarimi, Paul B., Barnett, Scott A.

Journal:

Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 712 KB

english, 1992

9

[IEEE LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society - San Diego, CA, USA (12-13 Nov. 2001)] LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242) - Next-generation parallel-optical data links

Giboney, K., Simon, J., Mirkarimi, L., Law, B., Flower, G., Corzine, S., Leary, M., Tandon, A., Kocot, C., Rana, S., Grot, A., Kun-Jing Lee,, Buckman, L., Dolfi, D.

Year:

2001

Language:

english

File:

PDF, 230 KB

english, 2001

10

Analysis of residual stress in cubic boron nitride thin films using micromachined cantilever beams

Cardinale, G.F., Howitt, D.G., McCarty, K.F., Medlin, D.L., Mirkarimi, P.B., Moody, N.R.

Journal:

Diamond and Related Materials

Year:

1996

Language:

english

File:

PDF, 766 KB

english, 1996

11

[IEEE 2004 54th Electronic Components and Technology Conference - Las Vegas, NV, USA (1-4 June 2004)] 2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE Cat. No.04CH37546) - Parallel optical interconnect at 10 Gb/s per channel

Simon, J., Windover, L.B., Rosenau, S., Giboney, K., Law, B., Flower, G., Mirkarimi, L., Grot, A., Chao-Kun Lin,, Tandon, A., Rankin, G., Gruhlke, R., Dolfi, D.

Year:

2004

Language:

english

File:

PDF, 1.18 MB

english, 2004

12

Assessing the visual impacts of new urban features: Coupling visibility analysis with 3D city modelling

Saeidi, Sepideh, Hamed Mirkarimi, Seyed, Mohammadzadeh, Marjan, Salmanmahiny, Abdolrassoul, Arrowsmith, Colin

Journal:

Geocarto International

Year:

2018

Language:

english

File:

PDF, 3.08 MB

english, 2018

13

Parallel-optical interconnects >100 gb/s

Windover, L.A.B., Simon, J.N., Rosenau, S.A., Giboney, K.S., Flower, G.M., Mirkarimi, L.W., Grot, A., Law, B., Chao-Kun Lin, Tandon, A., Gruhlke, R.W., Hui Xia, Rankin, G., Tan, M.R.T., Dolfi, D.W.

Journal:

Journal of Lightwave Technology

Year:

2004

Language:

english

File:

PDF, 1.14 MB

english, 2004

14

Diamond Ablators for Inertial Confinement Fusion

Biener, Juergen, Mirkarimi, Paul B., Tringe, Joseph W., Baker, Sherry L., Wang, Yinmin, Kucheyev, Sergei O., Teslich, Nick E., Wu, Kuang Jen J., Hamza, Alex V., Wild, Christoph, Woerner, Eckhard, Koid

Journal:

Fusion Science & Technology

Year:

2006

Language:

english

File:

PDF, 775 KB

english, 2006

15

The effects of hydro-ethanolic extract of Capparis spinosa (C. spinosa) on lipopolysaccharide (LPS)-induced inflammation and cognitive impairment: Evidence from in vivo and in vitro studies

Rahimi, Vafa Baradaran, Rajabian, Arezoo, Rajabi, Hamed, Vosough, Elahe Mohammadi, Mirkarimi, Hamid Reza, Hasanpour, Maede, Iranshahi, Mehrdad, Rakhshandeh, Hassan, Askari, Vahid Reza

Journal:

Journal of Ethnopharmacology

Year:

2020

Language:

english

File:

PDF, 1.37 MB

english, 2020

16

Effects of ambient conditions on the adhesion of cubic boron nitride films on silicon substrates

G.F. Cardinale, P.B. Mirkarimi, K.F. McCarty, E.J. Klaus, D.L. Medlin, W.M. Clift, D.G. Howitt

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 675 KB

english, 1994

17

Stress, reflectance, and temporal stability of sputter-deposited Mo/Si and Mo/Be multilayer films for extreme ultraviolet lithography

Mirkarimi, Paul B.

Journal:

Optical Engineering

Year:

1999

Language:

english

File:

PDF, 411 KB

english, 1999

18

Erratum: Evidence for rhombohedral boron nitride in cubic boron nitride films grown by ion-assisted deposition

Medlin, D. L., Friedmann, T. A., Mirkarimi, P. B., Mills, M. J., McCarty, K. F.

Journal:

Physical Review B

Year:

1995

Language:

english

File:

PDF, 423 KB

english, 1995

19

[IEEE 2005 Optical Fiber Communications Conference Technical Digest - Anaheim, CA, USA (2005.03.6-2005.03.11)] OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005. - Novel packaging of parallel-optical interconnects for high-end servers

Rosenau, S.A., Simon, J., Windover, L.A, Law, B., Flower, G.M., DeGroot, E., Grot, A., Nystrom, M.J., Chao-Kun Lin,, Tandon, A., Djordjev, K., Tan, M.R.T., Mirkarimi, L.W., Gruhlke, R.W., Hui Xia,,

Year:

2005

Language:

english

File:

PDF, 584 KB

english, 2005

20

Localized defects in multilayer coatings

D.G. Stearns, P.B. Mirkarimi, E. Spiller

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 884 KB

english, 2004

21

Characterization of ruthenium thin films as capping layer for extreme ultraviolet lithography mask blanks

P. Yan, E. Spiller, P. Mirkarimi

Year:

2007

Language:

english

File:

PDF, 1.10 MB

english, 2007

22

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Defect repair for extreme-ultraviolet lithography (EUVL) mask blanks

Engelstad, Roxann L., Hau-Riege, Stefan P., Barty, Anton, Mirkarimi, Paul B., Stearns, Daniel G., Chapman, Henry N., Sweeney, Donald W., Clift, W. Miles, Gullikson, Eric, Yi, Moon-Suk

Year:

2003

Language:

english

File:

PDF, 252 KB

english, 2003

23

SPIE Proceedings [SPIE SPIE Astronomical Telescopes + Instrumentation - Amsterdam, Netherlands (Sunday 1 July 2012)] Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II - Reflective coating for near-infrared immersion gratings

Kuzmenko, Paul J., Navarro, Ramón, Cunningham, Colin R., Ikeda, Yuji, Kobayashi, Naoto, Prieto, Eric, Mirkarimi, Paul B., Alameda, Jennifer B.

Year:

2012

Language:

english

File:

PDF, 1.41 MB

english, 2012

24

Deuterium-induced degradation of (Ba, Sr)TiO[sub 3] films

Ahn, Joon-Hyung, McIntyre, Paul C., Mirkarimi, Laura Wills, Gilbert, Stephen R., Amano, Jun, Schulberg, Michelle

Journal:

Applied Physics Letters

Year:

2000

Language:

english

File:

PDF, 237 KB

english, 2000

25

Evaluation of the relationship between soil erosion and landscape metrics across Gorgan Watershed in northern Iran

Ahmadi Mirghaed, Fazlolah, Souri, Bubak, Mohammadzadeh, Marjan, Salmanmahiny, Abdolrassoul, Mirkarimi, Seyed Hamed

Journal:

Environmental Monitoring and Assessment

Year:

2018

Language:

english

File:

PDF, 5.63 MB

english, 2018

26

Micromachined silicon cantilever beams for thin-film stress measurement

G.F. Cardinale, D.G. Howitt, W.M. Clift, K.F. McCarty, D.L. Medlin, P.B. Mirkarimi, N.R. Moody

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 963 KB

english, 1996

27

Reduced microbicidal and anti-tumour activities of human monocytes after ingestion of Plasmodium falciparum-infected red blood cells

P. L. FIORI, P. RAPPELLI, S. N. MIRKARIMI, H. GINSBURG, P. CAPPUCCINELLI, F. TURRINI

Journal:

Parasite Immunology

Year:

1993

Language:

english

File:

PDF, 739 KB

english, 1993

28

Substrate-Integrated Hollow Waveguides: A New Level of Integration in Mid-Infrared Gas Sensing

Wilk, Andreas, Carter, J. Chance, Chrisp, Michael, Manuel, Anastacia M., Mirkarimi, Paul, Alameda, Jennifer B., Mizaikoff, Boris

Journal:

Analytical Chemistry

Year:

2013

Language:

english

File:

PDF, 2.94 MB

english, 2013

29

A Kirkpatrick-Baez microscope for the National Ignition Facilitya)

Pickworth, L. A., McCarville, T., Decker, T., Pardini, T., Ayers, J., Bell, P., Bradley, D., Brejnholt, N. F., Izumi, N., Mirkarimi, P., Pivovaroff, M., Smalyuk, V., Vogel, J., Walton, C., Kilkenny, J

Journal:

Review of Scientific Instruments

Year:

2014

Language:

english

File:

PDF, 987 KB

english, 2014

30

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 22 February 1998)] Emerging Lithographic Technologies II - Advances in the reduction and compensation of film stress in high-reflectance multilayer coatings for extreme-ultraviolet lithography

Mirkarimi, Paul B., Montcalm, Claude, Vladimirsky, Yuli

Year:

1998

Language:

english

File:

PDF, 1.01 MB

english, 1998

31

SPIE Proceedings [SPIE Smart Structures & Materials '95 - San Diego, CA (Sunday 26 February 1995)] Smart Structures and Materials 1995: Smart Materials - Epitaxial Pb(ZrxTi1-x)O3/SrRuO3 (x=0,0.35,0.65) multilayer thin films on SrTiO3(100) and MgO(100) prepared by MOCVD and rf sputtering

Foster, Christopher M., Csencsits, Roseann, Baldo, Peter M., Bai, Guo-Ren, Zhuang, Li, Rehn, Lynn E., Wills-Mirkarimi, L. A., Hiskes, Ron R., Jardine, A. Peter

Year:

1995

Language:

english

File:

PDF, 673 KB

english, 1995

32

Photonic crystal microcavity sensor for ultracompact monitoring of reaction kinetics and protein concentration

Sanja Zlatanovic, Laura W. Mirkarimi, Mihail M. Sigalas, Maggie A. Bynum, Edmond Chow, Karla M. Robotti, Geoffrey W. Burr, Sadik Esener, Annette Grot

Journal:

Sensors and Actuators B: Chemical

Year:

2009

Language:

english

File:

PDF, 1001 KB

english, 2009

33

Ultrathick, low-stress nanostructured diamond films

Kucheyev, S. O., Biener, J., Tringe, J. W., Wang, Y. M., Mirkarimi, P. B., van Buuren, T., Baker, S. L., Hamza, A. V., Brühne, K., Fecht, H.-J.

Journal:

Applied Physics Letters

Year:

2005

Language:

english

File:

PDF, 389 KB

english, 2005

34

Crystallographic texture in cubic boron nitride thin films

Medlin, D. L., Friedmann, T. A., Mirkarimi, P. B., Cardinale, G. F., McCarty, K. F.

Journal:

Journal of Applied Physics

Year:

1996

Language:

english

File:

PDF, 607 KB

english, 1996

35

Practical approach for modeling extreme ultraviolet lithography mask defects

E. M. Gullikson, C. Cerjan, D. G. Stearns, P. B. Mirkarimi, D. W. Sweeney

Year:

2002

Language:

english

File:

PDF, 579 KB

english, 2002

36

SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Advances in Optical Thin Films V - Depth determination of critical fluence-limiting defects within planarized and non-planarized mirror coatings

Lequime, Michel, Macleod, H. Angus, Ristau, Detlev, Stolz, Christopher J., Wolfe, Justin E., Mirkarimi, Paul B., Folta, James A., Adams, John J., Menor, Marlon G., Raman, Rajesh, Neilsen, Norm, Norton

Year:

2015

Language:

english

File:

PDF, 1.20 MB

english, 2015

37

SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 13 September 2004)] 24th Annual BACUS Symposium on Photomask Technology - Overcoming substrate defect decoration effects in EUVL mask blank development

Kearney, Patrick A., Randive, Rajul V., Ma, Andy, Krick, David, Weaver, Al, Reiss, Ira, Abraham, Daniel, Mirkarimi, Paul B., Spiller, E., Staud, Wolfgang, Weed, J. Tracy

Year:

2004

Language:

english

File:

PDF, 476 KB

english, 2004

38

Tailoring a non-path-dependent model for environmental risk management and polycentric urban land-use planning

Sakieh, Yousef, Salmanmahiny, Abdolrassoul, Mirkarimi, Seyed Hamed

Journal:

Environmental Monitoring and Assessment

Year:

2017

Language:

english

File:

PDF, 2.77 MB

english, 2017

39

Synthesis and characterization of novel, optically active polyamides derived fromS-valine natural amino acid and bulky anthracenic side chain

Shadpour Mallakpour, Fatemeh Mirkarimi

Journal:

Year:

2010

Language:

english

File:

PDF, 320 KB

english, 2010

40

Printing-based performance analysis of the engineering test stand set-2 optic using a synchrotron exposure station with variable sigma

P. Naulleau, K. A. Goldberg, E. H. Anderson, J. Bokor, B. Harteneck, K. Jackson, D. Olynick, F. Salmassi, S. Baker, P. Mirkarimi, E. Spiller, C. Walton, D. O’connell, P. Yan, G. Zhang

Year:

2003

Language:

english

File:

PDF, 641 KB

english, 2003

41

Growth and printability of multilayer phase defects on extreme ultraviolet mask blanks

T. Liang, E. Ultanir, G. Zhang, S. Park, E. Anderson, E. Gullikson, P. Naulleau, F. Salmassi, P. Mirkarimi, E. Spiller, S. Baker

Year:

2007

Language:

english

File:

PDF, 933 KB

english, 2007

42

Employing a detailed compositional analysis to develop a low defect Mo/Si deposition tool and process for EUVL mask blanks

Andy Ma, Rajul Randive, Patrick Kearney, San-In Han, Soon-Cheon Seo, Toshiyuki Uno, Dave Krick, Paul Mirkarimi, Eberhard Spiller

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 150 KB

english, 2006

43

Method for repairing Mo/Si multilayer thin film phase defects in reticles for extreme ultraviolet lithography

Mirkarimi, P. B., Stearns, D. G., Baker, S. L., Elmer, J. W., Sweeney, D. W., Gullikson, E. M.

Journal:

Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 824 KB

english, 2002

44

Step-growth polymerization of 5-[(9,10-dihydro-9,10-ethanoanthracene-11,12-dicarboximido)-3-methylbutanoyl-amino]isophthalic acid with aromatic diols

Shadpour Mallakpour, Fatemeh Mirkarimi

Journal:

Journal of Applied Polymer Science

Year:

2010

Language:

english

File:

PDF, 471 KB

english, 2010

45

Ultracompact biochemical sensor built with two-dimensional photonic crystal microcavity

Chow, E., Grot, A., Mirkarimi, L. W., Sigalas, M., Girolami, G.

Journal:

Year:

2004

Language:

english

File:

PDF, 626 KB

english, 2004

46

On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition

Mirkarimi, P.B., McCarty, K.F., Medlin, D.L., Wolfer, W.G., Friedmann, T.A., Klaus, E.J., Cardinale, G.F., Howitt, D.G.

Journal:

Journal of Materials Research

Year:

1994

Language:

english

File:

PDF, 1.43 MB

english, 1994

47

Heteroepitaxial Growth of Transition-Metal Nitride Films

Shinn, M., Mirkarimi, P.B., Barnett, S.A.

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 1.96 MB

english, 1992

48

Simulations and Argon-Cluster-Ion Smoothing of Surfaces

Fenner, D. B., Dean, D. W., DiFilippo, V., Allen, L. P., Hautala, J., Mirkarimi, P. B.

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 809 KB

english, 2000

49

SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 8 September 2003)] 23rd Annual BACUS Symposium on Photomask Technology - EUVL mask with Ru ML capping

Yan, Pei-Yang, Zhang, Guojing, Chegwidden, Scott, Spiller, Eberhard A., Mirkarimi, Paul B., Kimmel, Kurt R., Staud, Wolfgang

Year:

2003

Language:

english

File:

PDF, 494 KB

english, 2003

50

Rules versus layers: which side wins the battle of model calibration?

Sakieh, Yousef, Salmanmahiny, Abdolrassoul, Mirkarimi, Seyed Hamed

Journal:

Environmental Monitoring and Assessment

Year:

2016

Language:

english

File:

PDF, 4.83 MB

english, 2016

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